Ion Implanter

Ion Implanter

Ion Implanter for Semiconductor

The ion implanter (I/I) is equipment used to produce semiconductors, by which impurity ions (phosphorus, boron, etc.) are impinged on wafers that form semiconductor device structures. There are various semiconductor products, including CPUs, DRAMs, and flash memory chips, used in computers and smartphones, as well as microcontrollers, sensors, and inverters used in electric vehicles (EVs and HEVs) and electric appliances. The I/I is essential equipment for the manufacture of diverse kinds of semiconductor products. Ion implantation involves complex and advanced technologies and is extremely important in the semiconductor manufacturing process because it is the sole process that precisely controls and establishes the electric characteristics of semiconductor materials, such as silicon, gallium arsenide, and silicon carbide (SiC).

Ion Implanter for Flat Panel Display(FPD)

The ion implanter (ion doping system: I/D) for flat panel displays (FPDs) is essential equipment for the manufacture of liquid crystal displays (LCDs) and organic light-emitting diode (OLED) displays, which are required to display high-definition images with high performance, such as in smartphones and other high-end mobile phones, digital cameras, and car navigation systems and other in-vehicle devices. The features of this implanter include high productivity and stable operation with the capability of uniform implantation over the entire surface of a large glass substrate in a short amount of time. Taking advantage of these features, the ion implanter for FPDs is used to form thin-film transistors (TFTs) incorporating low-temperature polysilicon (LTPS) and low-temperature polycrystalline oxide (LTPO), optimal for driving and controlling the aforementioned displays.

Features

Nissin Ion Equipment, a member of the Nissin Electric Group, supplies ion implanters for semiconductor manufacturing, which are suitable for power devices expected to come into wide use in the growing interest trend toward energy conservation and SDGs, as well as for highly versatile medium current devices.
Moreover, with ion implanters for FPD manufacturing, the company has shipped many units since it developed the world's first ion implanter for the manufacture of LTPS-TFTs in 1988. Thus, Nissin Ion Equipment established a firm, unparalleled footing in the pertinent market and has contributed to the widespread use of small and medium-sized, high-quality display products. Equipment manufactured by the company is selected for the manufacture of displays used in almost all middle- and high-end smartphone products.

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